【摘要】 为解决超声波焊接聚合物微器件存在的焊接精度低、稳定性差等问题，提出一种基于阻抗控制的超声波焊接策略，以聚甲基丙烯酸甲酯连通管与基片为试验对象开展聚合物微器件的超声波焊接研究。结果表明：系统阻抗值可间接表示当前的焊接状态，阻抗阈值与后续焊接时间取较小值时，焊接界面存在严重虚焊现象，取较大值时焊接界面出现气孔、溢流等熔接缺陷；在阻抗阈值120Ω、后续焊接时间0.8 s时的焊接效果最佳且焊接接头抗剪切强度达到11.6 MPa；试验验证了所设计策略的可行性，这为聚合物微器件精密焊接提供了一种有效途径。更多还原

【Abstract】 Ultrasonic welding of polymer micro-devices has problems such as low welding accuracy and poor stability. To solve these problems,an ultrasonic welding strategy based on impedance control is proposed. Using the Polymethyl Methacrylate(PMMA) connecting tube and the substrate as the experiment objects,the research on the ultrasonic welding of polymer micro-devices is conducted. The experiment results show that the system impedance value can indirectly indicate the current welding state. When the impedance threshold and subsequent welding time is taken as a low value,the welding interface has a serious false welding phenomenon. While the impedance threshold and subsequent welding time is taken as a high value,the welding interface has welding defects such as porosity and overflow. The best welding results are obtained while the impedance threshold and subsequent welding time are set to 120 Ω and 0.8 s. At this time,the shear strength of the welded joint reaches 11.6 MPa.The ultrasonic welding strategy based on impedance control is verified to be feasible through experiments,an which provided effective way for precision welding of polymer micro-devices.更多还原