【摘要】 利用微机电系统（MEMS）工艺，设计并制造了一种基于法拉第电磁感应定律的单片集成MEMS三轴磁场传感器。将两种不同结构的器件通过MEMS工艺集成到单一芯片上，完成单片集成MEMS三轴磁场传感器的制作。测试结果表明：在大气环境下，2S梁耦合器件对Z轴磁场的开环灵敏度为7.435μV/mT,非线性度为0.436%。当其用于Z轴磁场测量时，其对于X轴磁场的交叉轴抑制比γ_z,x为49.749 dB,对Y轴磁场的交叉轴抑制比γ_z,y为46.324 dB;在大气环境下，扭转框结构器件对X轴磁场的开环灵敏度为2.223μV/mT,非线性度为0.49%。当其用于X轴磁场测量时，其对于Z轴的交叉轴抑制比γ_x,z为44.687 dB,对Y轴磁场的交叉轴抑制比γ_x,y为41.138 dB。更多还原

【Abstract】 A novel three-axis monolithic integrated MEMS magnetic field sensor based on Faraday’s Law of Electromagnetic Induction is designed and fabricated adopting MEMS technology.Two kinds of devices with different structures are integrated into a single chip by MEMS technology to complete the fabrication of a three-axis magnetic field sensor.The experimental data reveal that in the atmospheric environment, the open-loop sensitivity of 2 S-beams coupling structure is 7.435 μV/mT when it’s measuring the Z-axis magnetic field and the nonlinearity is 0.436 %.When it is applied by X-axis and Y-axis magnetic field, the cross-axis rejection ratio of γ_z,x is 49.749 dB and γ_z,y is 46.324 dB.When it is applied by X-axis magnetic field, the open-loop sensitivity of torsion frame structure device is 2.223 μV/mT,and the nonlinearity is 0.49 %.When it is applied by Z-axis and Y-axis magnetic field, cross axis rejection ratio of γ_x,z is 44.687 dB and γ_x,y is 41.138 dB.更多还原