【摘要】 准直器是氢原子钟必不可少的元件,针对目前单孔准直器尺寸大的问题,提出基于电子束曝光制备新型多孔准直器的思路。通过电子束曝光技术和玻璃棒管嵌套拉制法制备的13μm、20μm、10μm、12μm这4种多孔准直器的对比,探究了孔径形貌、光透过率、内壁粗糙度等基本性能。实验结果表明准直器光透过率按孔径由小到大分别是99.04%、98.06%、98.40%、96.18%,前3种准直器这一项性能指标都较为优越。内壁面粗糙度Sa按孔径由小到大分别是0.757 nm、1.210 nm、6.991 nm、7.350 nm,表明玻璃棒管嵌套拉制法制备的准直器在这一指标上性能较优越。更多还原

【Abstract】 Collimator is an essential component of hydrogen atom clock. To solve the problem of large size of single hole collimator, a new kind of porous collimator based on electron beam exposure is proposed.Through the comparison of 13 μm, 20 μm, 10 μm and 12 μm perforated collimators prepared by the electron beam exposure technology and the glass rod tube embedded drawing method, the basic properties of aperture morphology, light transmittance and inner wall roughness were investigated.The experimental results show that the light transmittance of collimators is 99.04%, 98.06%, 98.40% and 96.18% according to the aperture, and the performance index of the first three collimators is relatively superior. The roughness Sa of the inner wall is 0.757 nm, 1.210 nm, 6.991 nm and 7.350 nm according to the aperture, indicating that the collimator prepared by the existing glass rod tube drawing method has a better performance in this index.更多还原