【摘要】 文中以多层石墨烯膜为敏感膜片,分别制备了基于PDMS、SU-8、氧化锆的石墨烯膜F-P声压传感器,应用薄膜与基底之间吸附理论,分析了石墨烯膜与基底间吸附能相对于基底材料的杨氏模量成正向变化的趋势,并实验测试了所制备的声压传感器灵敏度。实验结果表明,制备的PDMS和SU-8基底具有较大的表面粗糙度,其虽降低了与石墨烯膜的吸附能,但也造成悬浮石墨烯膜的周边固支边界条件变差,且较软的基底材料易导致F-P腔体变形,从而造成灵敏度整体上未能提升。更多还原

【Abstract】 In this paper,the F-P(Fabry-Perot) acoustic sensors with graphene diaphragm transferred onto the different substrates fabricated by PDMS,SU-8 and zirconia were developed,respectively.Then the adsorption theory between film and substrate was used to demonstrate the increasing adsorption energy between the graphene film and the fabricated substrate with the increase in Young’s modulus of the corresponding substrates.Experiment results show that the fabricated PDMS and SU-8 substrates have higher surface roughness,although it reduces the adsorption energy of graphene membrane,the surrounding fixed boundary conditions of the suspended graphene diaphragm become worse.Furthermore,the soft substrate material is likely to cause the F-P cavity deformation,thereby resulting in no effective improvement in sensitivity.更多还原