【摘要】 为了合理测控气体流量,对气体流量控制技术进行了初步研究。由于气体分子具有间距大、活性强、易受外界环境干扰的特性,要实现气体流量的精确控制,首先要实现气体流量精确测量,再确保控制器精确控制。对传感器及控制器进行了研究,在阅读近期流量控制技术发展相关文献的基础上,对气体流量控制技术在传感器和控制器两个方面的相关研究进行综述。分别列举了流量传感器近期的研究成果,对采用不同控制算法控制器的控制效果进行了比较,并对未来气体流量控制技术的发展方向进行了简要阐述。更多还原

【Abstract】 In order to measure and control the gas flow reasonably,a preliminary study on the gas flow control technology is carried out.Due to the characteristics of large distance between gas molecules,strong activity,and susceptibility to interference from the external environment,in order to achieve precise control of the gas flow,firstly,it is necessary to realize the accurate measurement of the gas flow,and then ensure the precise control of the controller.This article is based on the author’s research on sensors and controllers on the basis of reading related literature on the development of flow control technology in recent years.The related research on gas flow control technology in sensor and controller is reviewed,the latest research results of flow sensor are listed respectively,and the control effect of different control algorithms used by the controller is compared.And the future development direction of gas flow control technology is briefly described.更多还原