【摘要】 主轴回转误差是超精密领域的一个重要参数,准确测量主轴回转误差,对控制主轴运动、提高加工精度而言具有重要意义。介绍了主轴回转误差测量技术的研究现状。现有的主轴回转误差测量技术可以分为探针法、光学法、刻痕法,对探针法中常用的反转法、多点法、多步法进行了原理论述与误差分析。更多还原

【Abstract】 Spindle rotation error is an important parameter in the ultra-precision field.Accurate measurement of spindle rotation error is of significance for control of spindle movement and improvement of machining accuracy.The research status of measurement technology for spindle rotation error was introduced.The existing measurement technology for spindle rotation error can be divided into probe method,optical method,and indentation method.The principle discussion and error analysis of the commonly used inversion method,multi-point method and multi-step method in the probe method were carried out.更多还原