【摘要】 提出了一种以压电陶瓷驱动、以柔性铰链传动的自解耦二维微位移平台。该平台通过桥式机构放大输入位移,并基于双四杆平行四边形导向机构实现二自由度运动解耦。建立了柔性铰链的伪刚体模型,推导出柔性铰链弯曲刚度、平台输出刚度表达式,通过能量法计算了平台一阶固有频率。经试验验证,平台工作行程为126.10μm×126.30μm,重复定位精度可达0.29μm,运动耦合率小于2.2%,一阶固有频率为1096.12 Hz。结果表明,文中的设计分析方法可靠,微位移平台性能表现较好,具有较高的实用意义。更多还原

【Abstract】 A self-decoupling, 2-degree of freedom(DOF) and micro-displacement platform is proposed, which is driven and transmitted by the piezoelectric ceramic and flexible hinge, respectively. The input displacement is amplified using the bridge mechanism, and realized motion decoupling based on double four-bar parallelogram guide mechanism. The pseudo-rigid-body model of flexible hinge is established, and the expressions of both the bending stiffness of flexible hinge and the output stiffness of platform are deduced. The first-natural frequency of platform is calculated via the energy method. Through experimental verification, the working stroke of the platform is 126.10 μm ×126.30 μm, and the repeat positioning accuracy can reach 0.29μm. The coupling rate of motion is less than 2.2%, and the first natural frequency is1096.12 Hz. The results show that this design analysis method is reliable and the micro-displacement platform has good performance, which has high practical significance.更多还原