【摘要】 讨论了液相外延生长过程中外延层厚度与生长条件的关系。在生长速率决定于溶质扩散的前提下,推导出了外延层厚度的卷积表达式。利用这一表达式,可以得出不同液相外延工艺中外延层厚度与生长时间、冷却速率的关系。并且,外延层厚度的卷积算法可以应用于更为复杂的生长条件,例如:非均匀的降温速率、非线性的液相线形状以及有限的生长溶液等。更多还原

【Abstract】 The relation between the film thickness and the growth conditions in the liquid phase epitaxy(LPE)process is discussed. A convolution approach for the thickness is developed on the assumption that the growth rate is determined by the solute diffusion process. Using this convolution expression,the relations between thickness,growth time and cooling rate can be obtained for various LPE techniques. Moreover,the convolution algorithm can also be used to deal with some complex growth conditions,such as nonuniform cooling rate,nonlinearity of the liquidus curve and the finite growth solution.更多还原