【摘要】 X射线聚焦镜用于收集和汇聚宇宙中X射线辐射,是X射线天文卫星观测载荷的核心部件。本文采用镍基底电铸复制方法,在包括化学镀镍磷合金、模具超精密加工、模具镀膜、电铸镍基体以及脱模的全工艺链上进行了大量工艺探索和装备研发,并最终完成了X射线聚焦镜的批量超精密制造。实验结果表明,聚焦镜模具加工精度-表面粗糙度小于0.5 nm RMS,面形精度优于0.5μm,镜片角分辨率为33.5″HPD(能量半高宽),验证了工艺的可靠性和先进性。更多还原

【Abstract】 An X-ray focusing mirror is used to collect X-ray radiation in the universe,and is the core component of an X-ray astronomical satellite observation payload. In this study,process exploration and equipment research and development are conducted on the entire process chain(including electroless nickelphosphorus alloy plating,mold ultra-precision machining,mold coating,electroforming nickel matrix,and demodulator)using the electroforming replication method of a nickel substrate,and finally,the batch ultra-precision manufacturing of X-ray focusing mirrors is completed. The results indicate that the surface roughness of the focusing lens mold processing precision is less than 0. 5 nm RMS,surface shape precision is better than 0. 5 m,and lens Angle resolution is 33. 5″（half-power diameter）,thus validating the reliability of the process. The study findings are expected to provide important technical support for China’s space X-ray observation,break the foreign monopoly,and significantly improve China’s astronomical observation ability in the field of high-energy celestial bodies.更多还原