【摘要】 当移相干涉仪受较大振动干扰时,会导致其无法准确获取较优干涉图组,为了解决该问题,提出了一种基于干涉条纹图像分析的振动检测方法。从图像处理角度,该方法分析了干涉图像中条纹的形状、数量和移相方向等特征与低频高幅度振动的关系,从而判断其是否受较大的低频振动影响;从统计学角度,该方法分析了干涉图组的移相特征与中高频低幅度振动的关系,计算出干涉图组的移相稳定性和准确性并评估整体移相质量,来判断其是否受较大的中高频振动影响。基于上述方法开发了相应的算法,经实验验证,在获取序列干涉图组时,该方法可智能地判断并筛选出受振动干扰较小的干涉图组,进而计算出准确的波面信息,提高了系统的抗振能力,对移相干涉技术的实际应用具有意义。更多还原

【Abstract】 When the phase-shifting interferometer is disturbed by large vibration,it will not be able to accurately obtain the better interference group image. In order to solve this problem,a vibration detection method is proposed based on interference fringe image analysis. The proposed method is divided into two parts. From the perspective of image processing,the characteristics of the fringe shape,number,and phaseshift direction in the interferogram are analyzed,and the relationship between the characteristics and the low frequency,high amplitude vibration is obtained. Based on this,we can judge whether the interferogram is affected by low frequency vibration. From the perspective of statistics,the relationship between the phaseshift characteristics of the interferogram group and the mid-high frequency,low amplitude vibration is analyzed. By calculating the phase shift stability and accuracy of the interference group picture and evaluating the overall phase shift quality,we can judge whether the interferogram group is affected by mid-high frequency vibration.Based on the above method,the corresponding algorithm has been developed. After repeated experiments and verification,the method can intelligently judge and screen out the interference group pictures that are less disturbed by vibration when obtaining the sequence interference group pictures. Then we can calculate accurate wavefront information based on the obtained high-quality interferogram group. This method improves the anti-vibration ability of the system and is of significance to the practical application of phase-shifting interference technology.更多还原