【摘要】 利用原子层沉积（ALD）技术在37CrMnMo钢表面沉积Al₂O₃超薄膜,通过极化曲线、电化学阻抗谱以及形貌表征,分析了薄膜的致密性以及薄膜厚度对基底的防护效果。结果表明:超薄Al₂O₃膜致密均匀,且薄膜孔隙率随其厚度的增加而降低;与合金钢基材相比,表面沉积150 nm厚Al₂O₃薄膜的37CrMnMo钢,其腐蚀电流密度降低了三个数量级;在0.1 mol/L NaCl溶液中,Al₂O₃薄膜对37CrMnMo钢基底腐蚀起到了良好的防护作用。更多还原

【Abstract】 Al₂O₃ ultra-thin films were deposited on 37 CrMnMo steel surface by atomic layer deposition（ALD） technique. The compactness of films and protective effect of film thickness on the substrate were analyzed through polarization curves, electrochemical impedance spectroscopy and morphology characterization. The results show that the ultra-thin Al₂O₃ films were dense and uniform, and the porosity of films decreased with the increase of thickness. The corrosion current density of 37 CrMnMo steel with 150 nm Al₂O₃ film deposited on the surface was reduced by three orders of magnitude compared with alloy steel base material. The Al₂O₃ films had a good protective effect on the corrosion of 37 CrMnMo steel substrate in 0.1 mol/L NaCl solution.更多还原