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LTCC生瓷带的环境、工艺与材料适应性要求研讨

Requirement Discussing of the Suitability of LTCC Green Tape for Environment,Process and Materials

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【作者】 何中伟高亮李冉

【Author】 HE Zhongwei;GAO Liang;LI Ran;East China Institute of Photo-Electronic Devices;

【机构】 华东光电集成器件研究所

【摘要】 根据应用场合与特点,研究提出了LTCC生瓷带对使用环境、工艺与材料的适应性要求,包括应具有优良的表面质量、稳定的生片尺寸、合适的揭膜特性、较高的抗拉强度,以及适用于基本的LTCC落片、打孔、填孔、网印、叠片、层压、切片、共烧工艺及其配套的浆料。结合用户的工艺与测试平台条件,研究讨论了对相关适应性进行检测和评价的步骤与方法。

【Abstract】 Based on the application circumstances and characteristics,the requirements of the suitability of LTCC green tape for environment,process and materials are studied and put forward.It should have good surface quality,stable green sheet dimensions,appropriate film-peeling performance,rather high tensile strength,and should be applicable to the basic LTCC blanking,via forming,via filling,screen printing,stacking,lamination,cutting,co-firing processes and the matching pastes.Linked up with the user’s process and checkup platform conditions,the checkup method and steps of the related checkup and evaluation are studied and discussed.

  • 【文献出处】 电子工艺技术 ,Electronics Process Technology , 编辑部邮箱 ,2021年05期
  • 【分类号】TN405
  • 【被引频次】1
  • 【下载频次】309
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