【摘要】 归纳了在不同化学镀体系中利用单组分添加剂和双组分添加剂来实现超级化学镀填充技术的研究进展。阐述了聚二硫二丙基磺酸钠、N,N-二甲基硫代氨基甲酰基丙烷磺酸钠、聚乙二醇等添加剂对微孔或微道沟填充的作用机制,为今后实现更窄的微孔和微道沟的完美填充提供方法和策略。更多还原

【Abstract】 The research progress of using single-component and two-component additives in the electroless plating systems to realize the superfilling was summarized. The action mechanisms of different additives such as bis(3-sulfopropyl)disulfide, 3-N,N-dimethylaminodithiocarbamoyl-1-propanesulfonic acid, and poly(ethylene glycol) on the superfilling of microholes or microtrenches were described. Some effective approaches and strategies to achieve superfilling of narrower microholes and microtrenches in the future were provided.更多还原