【摘要】 提出微光机电系统陀螺仪的光学检测方法,设计了由光栅耦合器、回音壁模式谐振腔和光波导组成的微光学检测器件,实现与盘式谐振陀螺仪的单片集成。理论分析了谐振腔的谱线漂移和耦合机制,通过调整结构参数得到品质因数为5 303.1。分析了光栅周期、刻蚀深度、入射角和上包层对光栅耦合器耦合效率的影响,通过不断优化调整最终实现了51.5%的水平耦合。最后对实验测试结果进行讨论。更多还原

【Abstract】 An optical detection method for a micro-opto-electro-mechanical system gyroscope is proposed.A micro-optical detection device composed of grating couplers,a whispering gallery mode resonator and an optical waveguide is designed to realize monolithic integration with a disk resonant gyroscope.The spectral drift and coupling mechanism of the resonator is theoretically analyzed.By adjusting the structural parameters,the quality factor is 5 303.1.The effects of grating period,etch depth,incident angle and upper cladding layer on the coupling efficiency of the grating couplers are analyzed,and 51.5 % horizontal coupling is finally achieved through continuous optimization of adjustment.Finally,the test results are discussed.更多还原