【摘要】 面向"智慧海洋"应用需求,基于微机电系统（MEMS）技术设计制备了一批温度、盐度、酸度（pH值）三参数集成微纳传感器。温度测量采用铂电阻传感器,盐度测量采用4电极电导率传感器,pH测量采用钛/二氧化钛（Ti/TiO₂）为工作电极和液接式Ag/AgCl参比电极构成的两电极体系。采用电化学工作站分别测量了三个传感器的基本参数和性能,其中温度传感器的电阻为（2240±5）Ω,灵敏度为8.636Ω/℃,测量精度达到±0.01℃;电导率传感器在0.01 mol/L KCl溶液中精度为±0.000 5 S/m; pH传感器灵敏度为42.86 mV/pH。由于采用微机电加工技术,传感器尺寸小、成本低、可批量制造,将为海洋环境参数的高精度网格化测量提供核心传感器。更多还原

【Abstract】 In order to meet the application requirements of"smart ocean",a batch of integrated micro-/nanosensors with three parameters of temperature,salinity and acidity（pH） are designed and fabricated based on microelectro-mechanical system（MEMS） technology.Platinum resistance sensor is used for temperature measurement,4-electrode conductivity sensor is used for salinity measurement,and two electrode system composed of Ti/TiO₂ working electrode and liquid connected Ag/Ag Cl reference electrode is used for pH measurement.The basic parameters and performance of the three sensors are measured by electrochemical workstation.The resistance of the temperature sensor is（2 240 ± 5） Ω,the sensitivity is 8.636 Ω/℃,and the measurement precision is ± 0.01 ℃;the precision of conductivity sensor in 0.01 mol/L KCl solution is ± 0.000 5 s/m,and the sensitivity of pH sensor is 42.86 mV/pH.Due to the use of MEMS technology,the sensor is small in size,low in cost and can be manufactured in batch.It will provide the core sensor for high-precision grid measurement of marine environmental parameters.更多还原