【摘要】 介绍电容薄膜真空计校准装置的研制过程,采用静态膨胀法原理,其测量范围为(1×10^-1～1×10⁴)Pa,相对扩展不确定度为（0.22%～0.06%）（k=2）。装置体积比采用原位法进行测试,各体积比相对标准不确定度为0.02%。更多还原

【Abstract】 A calibration apparatus of capacitance diaphragm vacuum gauge set up was introduced. The apparatus was based on the vacuum static expansion method and the measuring range is(1×10^-1～1×10⁴) Pa with the relative expanded uncertainty（0.22%～0.06%）（k = 2）. The volu me ratios of the apparat us were measured by in-situ method and the standard relative expanded uncertainty of each volume ratio was 0.02%.更多还原