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Growth and physical characterization of high resistivity Fe: β-Ga2O3 crystals

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【作者】 张浩; 唐慧丽; 何诺天; 朱智超; 陈佳文; 刘波; 徐军;

【Author】 Hao Zhang;Hui-Li Tang;Nuo-Tian He;Zhi-Chao Zhu;Jia-Wen Chen;Bo Liu;Jun Xu;MOE Key Laboratory of Advanced Micro-Structured Materials, School of Physics Science and Engineering,Institute for Advanced Study, Tongji University;School of Chemical Science and Engineering, Tongji University;Shanghai Engineering Research Center for Sapphire Crystals;

【通讯作者】 唐慧丽;

【机构】 MOE Key Laboratory of Advanced Micro-Structured Materials, School of Physics Science and Engineering,Institute for Advanced Study, Tongji University; School of Chemical Science and Engineering, Tongji University; Shanghai Engineering Research Center for Sapphire Crystals;

【摘要】 High quality 0.02 mol%, 0.05 mol%, and 0.08 mol% Fe: β-Ga2O3 single crystals were grown by the floating zone method. The crystal structure, optical, electrical, and thermal properties were measured and discussed. Fe: β-Ga2O3 single crystals showed transmittance of higher than 80% in the near infrared region. With the increase of the Fe doping concentration, the optical bandgaps reduced and room temperature resistivity increased. The resistivity of 0.08 mol% Fe:β-Ga2O3 crystal reached to 3.63× 1011?·cm. The high resistivity Fe: β-Ga2O3 single crystals could be applied as the substrate for the high-power field effect transistors(FETs).

【Abstract】 High quality 0.02 mol%, 0.05 mol%, and 0.08 mol% Fe: β-Ga2O3 single crystals were grown by the floating zone method. The crystal structure, optical, electrical, and thermal properties were measured and discussed. Fe: β-Ga2O3 single crystals showed transmittance of higher than 80% in the near infrared region. With the increase of the Fe doping concentration, the optical bandgaps reduced and room temperature resistivity increased. The resistivity of 0.08 mol% Fe:β-Ga2O3 crystal reached to 3.63× 1011?·cm. The high resistivity Fe: β-Ga2O3 single crystals could be applied as the substrate for the high-power field effect transistors(FETs).

【基金】 Project supported by the Scientific and Innovative Action Plan of Shanghai,China (Grant No. 18511110502);Equipment Pre-research Fund Key Project,China (Grant No. 6140922010601)
  • 【文献出处】 Chinese Physics B ,中国物理B , 编辑部邮箱 ,2020年08期
  • 【分类号】O782.6
  • 【被引频次】3
  • 【下载频次】32
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