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Oxide-aperture-dependent output characteristics of circularly symmetric VCSEL structure

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【作者】 廖文渊李健李川川郭小峰郭文涛刘维华张杨杰韦欣谭满清

【Author】 Wen-Yuan Liao;Jian Li;Chuan-Chuan Li;Xiao-Feng Guo;Wen-Tao Guo;Wei-Hua Liu;Yang-Jie Zhang;Xin Wei;Man-Qing Tan;State Key Laboratory of Integrated Optoelectronic, Institute of Semiconductors, Chinese Academy of Sciences;College of Materials Science and Opto-Electronic Technology, University of Chinese Academy of Sciences;Laboratory of Nano-photoelectronics, Institute of Semiconductors, Chinese Academy of Sciences;

【通讯作者】 谭满清;

【机构】 State Key Laboratory of Integrated Optoelectronic Institute of Semiconductors Chinese Academy of SciencesCollege of Materials Science and Opto-Electronic Technology University of Chinese Academy of SciencesLaboratory of Nano-photoelectronics Institute of Semiconductors Chinese Academy of Sciences

【摘要】 The influence ot oxidation aperture on the output characteristics ot the circularly symmetric vertical-cavity-surtaceemitting laser(VCSEL) structure is investigated.To do so,VCSELs with different oxide aperture sizes are simulated by the finite-difference time-domain(FDTD) method.The relationships among the field distribution of mode superposition,mode wavelength,output spectra,and far-field divergence with different oxide apertures are obtained.Further,VCSELs respectively with oxide aperture sizes of 2.7 μm,4.4 μm,5.9 μm,7 μm,8 μm,9 μm,and 18.7 μm are fabricated and characterized.The maximum output power increases from 2.4 mW to 5.7 mW with oxide aperture increasing from 5.9 μm to 9 μm.Meanwhile,the wavelength tuning rate decreases from 0.93 nm/mA to 0.375 nm/mA when the oxide aperture increases from 2.7 μm to 9 μm.The thermal resistance decreases from 2.815℃/mW to 1.015℃/mW when the oxide aperture increases from 4.4 μm to 18.7μm.It is demonstrated theoretically and experimentally that the wavelength spacing between adjacent modes increases with the augment of the injection current and the spacing becomes smaller with the oxide aperture increasing.Thus it can be reported that the aperture size can effectively reduce the mode overlaying but at the cost of the power decreasing and the wavelength tuning rate and thermal resistance increasing.

【Abstract】 The influence ot oxidation aperture on the output characteristics ot the circularly symmetric vertical-cavity-surtaceemitting laser(VCSEL) structure is investigated.To do so,VCSELs with different oxide aperture sizes are simulated by the finite-difference time-domain(FDTD) method.The relationships among the field distribution of mode superposition,mode wavelength,output spectra,and far-field divergence with different oxide apertures are obtained.Further,VCSELs respectively with oxide aperture sizes of 2.7 μm,4.4 μm,5.9 μm,7 μm,8 μm,9 μm,and 18.7 μm are fabricated and characterized.The maximum output power increases from 2.4 mW to 5.7 mW with oxide aperture increasing from 5.9 μm to 9 μm.Meanwhile,the wavelength tuning rate decreases from 0.93 nm/mA to 0.375 nm/mA when the oxide aperture increases from 2.7 μm to 9 μm.The thermal resistance decreases from 2.815℃/mW to 1.015℃/mW when the oxide aperture increases from 4.4 μm to 18.7μm.It is demonstrated theoretically and experimentally that the wavelength spacing between adjacent modes increases with the augment of the injection current and the spacing becomes smaller with the oxide aperture increasing.Thus it can be reported that the aperture size can effectively reduce the mode overlaying but at the cost of the power decreasing and the wavelength tuning rate and thermal resistance increasing.

  • 【文献出处】 Chinese Physics B ,中国物理B , 编辑部邮箱 ,2020年02期
  • 【分类号】TN248
  • 【下载频次】55
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