【摘要】 计量是国家质量基础的重要组成部分,产品质量的提升离不开科学、精准的计量。工业发达国家极为重视计量测试技术的发展。通过搜集、整理量子效应计量、芯片级计量等国内外大量文献资料,归纳分析了近年来国外先进计量测试技术发展动态与趋势。以量子技术和基本物理常数为基础建立量子计量基标准,将大幅提高测量准确度和稳定性,结合量子效应的微加工技术实现芯片尺度的测量等,微纳尺度计量技术也在科学研究、精密测量、智能制造等领域得到广泛应用。本文可为我国计量技术发展提供借鉴。更多还原

【Abstract】 Metrology is one key part of national quality foundation,its technical level directly reflects the status of the scientific and technical development. Industrial developed countries attach great importance to development of metrology and measurement. By collecting and sorting lots of documents on the quantum metrology,on-chip measurement,etc. more new standards was established,which great improved measurement accuracy and stability based on quantum effect. Micromachining technology implement on-chip measurement based on quantum effect. Otherwise nanoscale metrology is widely used in scientific research,precision measurement,intelligent manufacturing,et al. A summary of the development trend of foreign advanced metrology and measurement technology is given and a close analysis is made in this paper,providing a useful reference for the development of national metrology and measurement.更多还原