【摘要】 原子力显微镜的图像质量受到探针磨损情况的直接影响,本文主要对基于超平表面的原子力显微镜(AFM)探针磨损问题进行了试验研究,针对探针磨损效率以材料表面的粗糙度(Rq)作为评估指标,测试样品选用了Rq小于0.5nm的超平表面。探针在10%的反馈回路设定值比例和悬臂目标振幅比例的测试条件下,采用1Hz的扫描速度及1.7的I-gain值可使磨损最小,进而有效提升探针使用寿命。更多还原

【Abstract】 The image quality of AFM is directly affected by the wear of AFM probe. In this paper, the wear of AFM probe based on super flat surface is studied. For the wear efficiency of AFM probe, the roughness of material surface(RQ) is used as the evaluation index, and the super flat surface with RQ less than 0.5 nm is selected as the test sample. Under the test condition of 10% set value proportion of feedback loop and cantilever target amplitude proportion, the use of 1 Hz scanning speed and 1.7 i-gain value can minimize the wear of the probe, thus effectively improving the service life of the probe.更多还原