【摘要】 SAW温度传感器具有无线无源的特点,在高温等恶劣环境中具有良好的应用前景。电极的高温稳定性是影响SAW温度传感器件工作温度的重要因素,采用耐高温的压电材料CTGS作为压电基底,通过PLD技术在压电基底表面制备Al₂O₃/ITO/Pt/Al₂O₃多层薄膜作为电极,氧化铝作为保护层能够抑制高温下金属薄膜的团聚现象以提高电极的高温稳定性,利用高温下ITO薄膜的导电性来补偿Pt薄膜高温下增大的电阻率,这种多层薄膜结构能够在高温环境中保持较好的稳定性。测试结果表明,所制作的SAW温度传感器可以工作至1 000℃,在1 000℃环境中持续工作5 h,并具有较好的重复性,这是由于所采用的Pt/ITO薄膜电极在高温下仍具有良好的导电性所致。更多还原

【Abstract】 SAW sensors have important potential applications in harsh environments such as high temperature due to its ability of wireless and passive operation. The high temperature stability of the electrode is the important factors that affect work temperature SAW temperature sensor, the use of high-temperature piezoelectric materials CTGS as piezoelectric substrate, by PLD technology in the piezoelectric substrate surface preparation of Al₂O₃/ITO/Pt/Al₂O₃ multilayer film as electrode, alumina as a protective layer metal film can restrain the heat reunion phenomenon in order to improve the high temperature stability of the electrode,the conductivity of ITO thin film with high temperature increases to compensate for Pt thin film under high temperature resistivity of the multilayer film structure can maintain good stability in high temperature environment. The results show that the produced SAW sensor can work up to 1 000 ℃ with good repeatability,is capable of operating continuously at 1 000 °C for 5 hours, which is originated from the good conductivity of the Pt/ITO thin film electrode at high temperature.更多还原