【摘要】 MEMS电容式加速度计受温度影响,敏感结构易产生结构参数及应力变化,电路易产生漂移,两者共同作用引起加速度计输出电压变化,使加速度的测量出现温漂误差及升、降温的温漂滞环误差。抑制温漂是提高加速度计性能的关键所在。在实验室现有MEMS加速度计敏感结构芯片及电路基础上,进行闭环后数字化补偿。实验证实,该方法能有效减小温漂误差,削减温漂滞环的幅值,改善加速度计的性能。更多还原

【Abstract】 Due to the influence of temperature,the sensitive structure of MEMS capacitive accelerometer is easy to produce structural parameters and stress changes,and the circuit is easy to produce drift.The combination of the two causes the change of output voltage of the accelerometer,which makes the measurement of acceleration appear temperature drift error and temperature rise and fall hysteresis error.The key to improve the performance of the accelerometer is to suppress temperature drift.In this paper,based on the existing MEMS accelerometer sensitive structure chip and circuit,digital compensation after closed-loop is carried out.Experiments show that the method can effectively reduce the temperature drift error,reduce the amplitude of temperature drift hysteresis,and improve the performance of accelerometer.更多还原