【摘要】 针对微波真空电子器件中的关键零部件——慢波结构微细内槽的加工难题,提出了一种电火花微细加工内槽的方法;设计制作了片状叠式组合的工具电极,通过这种电极的工艺试验,确定了损耗低、加工稳定可靠的电火花加工参数与条件,实现了对慢波结构微细内槽的加工。结果表明:采用电火花加工工艺方法和所制作工具电极是解决慢波结构微细内槽加工的有效方法之一,所加工零件满足了图纸要求。更多还原

【Abstract】 Aiming at the problem of machining the micro-inner grooves of slow-wave structure, the key component of microwave vacuum electronic devices, a method of micro-electrical discharge machining the micro-inner grooves is proposed in this paper. The tool electrode was designed and fabricated by means of laminar combination. The EDM parameters with low loss and reliable processing were determined through the technological experiment of this electrode, and the machining of micro-inner groove of slow-wave structure was realized. The results show that the EDM technology and the combination tool electrode are one of the effective methods to solve the problem of slow-wave structure microgroove machining, and the workpiece can meet the requirements of the drawing design.更多还原