【摘要】 设计和加工了一台相位补偿的压电变形镜,使用干涉仪离线表征了其压电变形性能,并提出迭代全局优化算法,实现了变形镜对目标面形的快速高精度逼近。结合X射线散斑扫描技术,在光束的聚焦模式下测试了变形镜的在线相位补偿性能和对聚焦光斑尺寸的优化能力,结果显示,初始的43.4μm焦斑尺寸经相位补偿后被压缩到了12.9μm。上述研究为上海同步辐射光源的快速相位补偿提供了可能。更多还原

【Abstract】 A piezoelectric deformable mirror for phase compensation is designed and fabricated and its piezoelectric properties are ex situ characterized by using the Fizeau interferometer. Moreover, an iterative global optimization algorithm is developed to realize a quick and accurate approach to the target figure. The in situ phase compensation performance of the mirror and its ability to optimize the focusing spot size are verified under the focusing beam mode and with the hard X-ray speckle scanning metrology. The experimental results show that the focal spot size is compressed from 43.4 μm to 12.9 μm after phase compensation. The research here lays a foundation for the realization of rapid phase compensation in the Shanghai Synchrotron Radiation Facility.更多还原