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碲化锗场效应晶体管的制备及电学性能

Preparation and Electrical Properties of Germanium Telluride Field Effect Transistor

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【作者】 张鑫赵付来王宇梁雪静冯奕钰封伟

【Author】 ZHANG Xin;ZHAO Fulai;WANG Yu;LIANG Xuejing;FENG Yiyu;FENG Wei;School of Materials Science and Engineering;Key Laboratory of Advanced Ceramics and Machining Technology,Ministry of Education,Tianjin University;Key Laboratory of Materials Processing and Mold,Ministry of Education,Zhengzhou University;

【通讯作者】 封伟;

【机构】 天津大学材料科学与工程学院先进陶瓷与加工技术教育部重点实验室郑州大学材料加工与模具教育部重点实验室

【摘要】 采用微机械剥离法得到横向尺寸为10μm的碲化锗(GeTe)纳米片.通过电子束曝光和真空溅射镀膜的方法,以钛金合金为接触电极,制备基于二维碲化锗(2D-GeTe)纳米材料的场效应晶体管(FET),并测定了其电学性能.结果表明,剥离所得GeTe纳米材料具有良好的结晶性,光学带隙为1.98 eV,属于p型半导体;该场效应晶体管展现出了6.4 cm2·V-1·s-1的载流子迁移率和670的开关电流比的良好电学性能.

【Abstract】 Compared with three-dimensional(3 D)materials,two-dimensional(2 D)materials have excellent photoelectric properties,and can be used in many fields such as electronics and photocatalysis,etc. Two-dimensional germanium telluride(2 D-GeTe)belongs to a narrow-band gap semiconductor,and its carrier mobility has a theoretical value of up to 1066.33 cm2·V-1·s-1,but its crystal structure limits its application in the field of optoelectronics. In this work,a GeTe alloy was synthesized by a high-temperature sintering method in a tube furnace,and then a GeTe nanosheet with a lateral dimension about 10 μm successfully was prepared by micromechanical exfoliation. After heat-treating the material,through the method of electron beam exposure and vacuum sputtering coating,using titanium(10 nm)/gold(60 nm)alloy as the contact electrode,the 2 DGeTe based field effect transistor(FET)was prepared,and the electrical properties were measured at room temperature. The results show that the GeTe nanomaterials obtained by exfoliating have good crystallinity,a wide optical absorption range,and an optical band gap of 1.98 eV,which belongs to p-type semiconductors.At the same time,the FET devices prepared based on 2 D-GeTe exhibits favorable electrical properties,with a channel length of 7 μm,a channel width of 3 μm,and a carrier mobility of 6.4 cm2·V-1·s-1,the switching current ratio is 670. And the output curve is non-linear,which indicates that due to the preparation process and the environment,there is a clear Schottky barrier between the material and the contact electrode. In short,the study of 2 D-GeTe electrical properties and the successful preparation of FET devices have enriched the types of two-dimensional materials in the field of semiconductor optoelectronic devices,and provide some reference and guidance for the research of high optoelectronic devices.

【基金】 国家自然科学重点基金(批准号:51633007);国家自然科学基金(批准号:51573125,51573147,51803149,51973155)资助~~
  • 【文献出处】 高等学校化学学报 ,Chemical Journal of Chinese Universities , 编辑部邮箱 ,2020年09期
  • 【分类号】TN386
  • 【被引频次】3
  • 【下载频次】175
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