【摘要】 准分子激光具有波长短、能量大等特点,在集成电路光刻、材料加工、医学、科研等领域具有重要的应用。与国外先进水平相比,我国高端准分子激光技术仍存在较大差距。本文首先简要介绍了准分子激光的特点和发展历史,然后分析了国内外准分子激光技术及相关典型应用的发展现状及需求,之后提出了我国准分子激光技术发展的主要问题。最后,针对相关问题及需求,建议未来重点在基础共性技术研究(高性能高端深紫外波段元器件设计、制备与性能表征研究,放电动力学等基础理论及验证研究等)、长脉冲、高重频、大能量/功率技术、新兴或潜在应用领域及衍生技术等研究方面继续加大加深研究力度,为我国准分子激光的自主可控发展奠定基础。更多还原

【Abstract】 Excimer laser has important applications in integrated circuit lithography, materials processing, medicine, and scientific research due to its short wavelength and high pulse energy. However, there remains a big gap in the high-end excimer laser technology between China and the international advanced level. In this article, the characteristics and development history of excimer lasers were briefly introduced first. Second, the development status and requirements of the excimer laser technology and its related typical applications were analyzed in China and abroad. Third, the main issues of the development of domestic excimer laser technology were proposed. Finally, in view of the relevant problems and needs, it is suggested that in the future, more efforts should be made to deepen the research, including basic generic technology research(design, preparation, and characterization of high-performance and high-end deep UV components, basic theory and verification research of discharge dynamics, etc.); long pulse, high repetition rate, and high energy/power technology; as well as emerging or potential application fields and derivative technologies, so as to lay the foundation for the independent and controllable development of excimer lasers in China.更多还原