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前驱体温度对激光化学气相沉积YBa₂Cu₃O_7-δ超导薄膜结构及性能的影响

Effect of precursor temperature on structure and properties of YBa₂Cu₃O_7-δ superconducting thin films prepared by laser chemical vapor deposition

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【Author】 ZHANG Qiong;ZHAO Pei;WU Wei;DAI Wubin;GOTO Takashi;XU Yuanlai;Hubei Key Laboratory of Plasma Chemistry and Advanced Materials(Wuhan Institute of Technology);Institute for Materials Research, Northeastern University;Key Laboratory for Green Chemical Process of Ministry of Education(Wuhan Institute of Technology);

【通讯作者】赵培;

【机构】等离子体化学与新材料湖北省重点实验室(武汉工程大学)；东北大学金属材料研究所；绿色化工过程省部共建教育部重点实验室(武汉工程大学)；

【摘要】采用激光化学气相沉积法在Al₂O₃基底上以49μm·h^-1的沉积速率高速制备了c-轴取向的YBa₂Cu₃O_7-δ薄膜,其中,激光功率为133 W,沉积温度1103 K,腔体压强800 Pa。研究了前驱体蒸发温度及薄膜退火温度对薄膜电学性能的影响。研究表明,Ba、Cu、Y前驱体加热温度分别为603、478、459 K时制备的薄膜在经813 K高温热处理12 h后,临界温度可达83 K。更多还原

【Abstract】 c-axis-oriented YBa₂Cu₃O_7-δ film was prepared on Al₂O₃ substrates at a deposition rate of 49 μm·h^-1 by laser chemical vapor deposition at a laser power of 133 W, with corresponding deposition temperature of 1103 K and total pressure of 800 Pa. Effects of the evaporation temperature and annealing temperature on the electrical properties of the film were investigated. The YBa₂Cu₃O_7-δ film showed a critical temperature of 83 K after heat-treated at 813 K for 12 h when the evaporation temperature of Ba, Cu, and Y precursors were 603 K, 478 K, and 459 K, respectively.更多还原