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恒电位电解型电化学气体传感器研究
Research of constant potential electrolysis-type electrochemical gas sensor
【摘要】 平面结构设计可以有效减小电化学气体传感器的结构尺寸,减少气体扩散路径,结合室温离子液体为电解质溶液,提升传感器性能。采用微加工、丝网印刷等平面制造工艺可以实现传感器的小型化、微型化、集成化设计与制备。采用柔性基底材料可进一步实现传感器的柔性化设计。
【Abstract】 Research progress of constant potential electrolysis-type electrochemical gas sensor is reviewed. It is found that planar structure-type electro-chemical gas sensor is the main development direction of electrochemical gas sensors. The planar structure design can effectively reduce structure size of sensor,reduce the gas diffusion path,and improve performance of sensor with room temperature ionic liquid as electrolyte solution. Using micromachining,screen printing and other planar manufacturing processes can realize the miniaturization and integration design and fabrication of the sensor. The flexible design of sensor can be realized by using flexible substrate material.
【Key words】 gas sensor; electrochemical; ionic liquid; planar structure;
- 【文献出处】 传感器与微系统 ,Transducer and Microsystem Technologies , 编辑部邮箱 ,2020年09期
- 【分类号】TP212
- 【被引频次】9
- 【下载频次】654