【摘要】 研究了改进的反射式离轴像面数字全息显微测量光学结构,该配置补偿了参考光束和物光束之间光程差,并具有结构紧凑和低成本优点,进而提出了一种更可靠的全息图条纹相干度与可见度的量化计算方法,比标准差更适合评估全息图质量,并分析了全息图条纹可见度对重建三维结构表面形貌的影响。实验证明了改进的数字全息显微测量光学结构在提高条纹相干度方面的有效性。更多还原

【Abstract】 An improved reflective off-axis image plane digital holographic micro-measurement optical structure is studied. In the configuration,the optical path difference between reference and object beams is compensated,it has advantages like compactness of structure and low-cost. Then a more reliable quantitative methods for calculating fringe visibility and degree of coherence of hologram are presented,which are more suitable for evaluating hologram quality than standard deviation. The influence of the fringe visibility of holograms on reconstructing 3 D structure surface topography is studied. Experimental results prove the effectiveness of the improved configuration on enhancing the degree of coherence.更多还原