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一种宽域型氧气传感器的制备及其性能研究
Preparation and Performance Study of a Wide-Area Oxygen Sensor
【摘要】 采用流延技术制备了YSZ电解质膜,并在其两面丝网印刷了电极和扩散障,将它们叠层共烧获得了氧气传感器。再将它与在氧化铝基片上丝网印刷铂浆制备的加热器组装获得了传感器器件,并测试了相关性能。加热器温度随输入电压增大而迅速上升,在13 V时可达690℃。通过对传感器在空气中线性电压扫描测试,典型的极限电流平台在输入电压为9 V、11 V和13 V时均被发现,表明它在此工作温度范围内具有监测21%以下氧气浓度的能力。扫描电压固定在0.7 V,又在这三种工作温度下测试了它对1%~21%范围内不同浓度氧气的响应电流信号。发现传感器可在10 s内快速响应,信号值与氧气浓度间存在较好的线性关系,且重复性好,表明它具有快速监测宽域氧气浓度的稳定性能。
【Abstract】 The YSZ electrolyte film was prepared by casting technology,and the electrodes and diffusion barrier were screen printed on both sides,and they were laminated and co-fired to obtain an oxygen sensor. Then it was assembled with a heater prepared by screen printing platinum paste on an alumina substrate to obtain a sensor device,and its related performance was tested. The heater temperature rises rapidly with the increase of the input voltage,reaching 690 ℃ at 13 V. Through the linear voltage sweep test of the sensor in the air,the typical limiting current platform were found when the heater input voltage was 9 V,11 V,and 13 V,indicating that it can monitor the oxygen concentration below 21% in this operating temperature range. When the scanning voltage was fixed at 0.7 V,the response current signals of different oxygen concentrations in the range of 1%~21% were tested at these three operating temperatures. It was found that the sensor can respond quickly and stably within 10 s,there was a good linear relationship between the signal value and the oxygen concentration,and the repeatability was good,indicating that it has the stability of quickly monitoring the oxygen concentration in a wide range.
【Key words】 oxygen sensor; wide area type; screen printing; limiting current; heater;
- 【文献出处】 传感技术学报 ,Chinese Journal of Sensors and Actuators , 编辑部邮箱 ,2020年12期
- 【分类号】TP212
- 【下载频次】125