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产生大面积均匀面电子源的电子枪设计
Designof New Electron Gun Capable of Generating Uniform Electron-Beam with Large Width
【摘要】 为了满足大尺寸微通道板(MCP)的性能测试和电子清刷除气处理,设计了一种电子枪,可以产生尺寸大、均匀性好、动态范围宽的平面电子源。该电子枪采用功函数较低的钽丝,加工成盘香式结构,通过外加电场,使得出射后打到微通道板输入面上的电子源束流密度可调、均匀性优于90%,12 h内的稳定性优于±0.1μA,动态范围达到7个数量级(10-12~10-5 A),可以实现对直径为50 mm的微通道板进行精确测试和严格的电子清刷处理,也可以应用于其它领域。
【Abstract】 A novel type of electron gun,capable of generating uniform e-beam with a large beam width and a narrow energy spread,was developed for the purposes of degassing by e-beam scrubbing and evaluation of large-sized microchannel plate(MCP) with e-beam.The original work was the tantalum filament in a shape of flat-spiral coil because of its lower work function.The characteristics of the prototyped e-gun were experimentally tested and evaluated.The results show that the e-beam had a uniformity of higher than 90%,a stability of better than ±0.1 μA within a period of 12 h,and a dynamic range up to 7-order of magnitude(10-12~10-5 A).In addition,the e-beam,generated by the novel electron gun,was used to rigorously characterize the properties of an MCP,50 mm in diameter and degassed by e-beam scrubbing.
【Key words】 Microchannel plate; Electron gun; Electron scrubbing; Thermionic emission; DC gain test;
- 【文献出处】 真空科学与技术学报 ,Chinese Journal of Vacuum Science and Technology , 编辑部邮箱 ,2019年12期
- 【分类号】TN12
- 【被引频次】3
- 【下载频次】187