【摘要】 提出了一种制作微通道型固定流导元件的方法,即基于硅硅直接键合将刻蚀深度约为1μm的沟槽结构密封成微通道,利用铟熔融封接技术使其与金属法兰结合构成通道型固定流导组件,使用氦质谱检漏仪对其漏率测试。测量结果表明,固定流导元件的流导测量值与理论计算值接近,相对误差不超过22.2%。氦气作为测量气体时,固定流导元件能够从高真空到30000 Pa压强下实现分子流状态,即流导恒定。更多还原

【Abstract】 A novel standard-leak with controllable molecular flow conductance was developed,comprising two glycol bonded Si-chips with gas inlet/outlet holes:one has surface micro-fluidic channels(～1 μm deep) fabricated by lithography and the other serves as the top-cover.The conductance can be well-controlled by adjusting the size/number of micro-channels.The constant conductance via the novel Si-based standard-leak,installed between two F35 flanges and sealed with indium gasket,was characterized with helium leak detector,scanning electron microscopy and atomic force microscopy.The measured results show that the new Si-based standard-leak is capable of providing a constant conductance of helium molecular flow in the up-stream pressure range from high vacuum up to 30000 Pa.The measured and calculated results were found to be in fairly good agreement with a relative error of approximately 22.2%.更多还原