【摘要】 分子泵除气系统出现异常断电的情况下,系统内部出气无法排出,同时外部大气进入真空系统,可能损坏分子泵、破坏系统真空状态,对以分子泵为主除气泵的真空物理实验造成不可预估的损失。为了消除实验过程中可能出现的这种隐患,通过在除气系统中设置合适的容气腔和高灵敏度、密封可靠的电磁阀,形成一种分子泵除气系统保护结构。应用该结构的分子泵除气系统实验结果表明:真空机组断电时间超过20min,分子泵仍可维持怠速除气状态,真空腔保持真空度在1×10-2 Pa以上,不影响物理实验真空性能。分子泵除气系统异常断电后较长时间的系统保护和高真空保持,可为采取补救措施,避免重大损失提供宝贵机会。更多还原

【Abstract】 When the molecular pump is shut off by accident,the inside gas cannot be pumped out and the outside air flows into the vacuum system,which may damage the molecular pump and the vacuum system,resulting in unexpected losses.In order to solve this problem,a new protection structure based on appropriate air cavity and sealed electromagnetic valve is proposed.With the protection structure,the molecular pump can keep pumping and the vacuum can be sustained at 1×10-2 Pa for 20 minutes after poweroff.The system protection and vacuum maintenance give chances to take remedial measures and avoid huge losses.更多还原