【摘要】 在可见光范围内,半导体发光二极管(LED)发展很不平衡,黄光LED光效(光功率效率)长期远低于其他颜色光效.本文基于GaN/Si体系,从材料生长、芯片制造、器件物理和专用装备等方面进行了系统研究,解决了外延膜龟裂、位错过多、量子阱应力过大、InGaN黄光阱材料相分离、空穴浓度不足、阱材料生长温度过低、衬底吸光、电极挡光等问题,率先实现了高光效黄光LED关键性突破.所研制的黄光LED器件,在20 A/cm~2驱动下波长565 nm黄光LED光效达26.7%,对应164 lm/W;在1 A/cm~2驱动下波长577 nm黄光LED光效达42.8%,对应248 lm/W.基于高光效黄光LED,开发了无荧光粉、多基色LED照明新光源,实现了纯LED照明光源在路灯、氛围灯等方面应用.更多还原

【Abstract】 The development of semiconductor light-emitting diode(LED) in the visible emission range is very unbalance, as the power efficiency of yellow LED is far below other colors. Based on the GaN/Si technology, the authors and his team made a systematic research from the aspect of material growth, chip fabrication, device physics and equipment design, resolved the problems of epi-film cracking, high dislocation density, large strain in quantum well(QW), phase separation in QW, low QW growth temperature, low hole concentration, light absorption by substrate and light blocking by electrode, successfully made a breakthrough in fabricating efficient yellow LED. The yellow LED chip achieves a power efficiency of 26.7% at 20 A/cm~2 with 565 nm wavelength and efficacy of 164 lm/W, and the power efficiency goes up to 42.8% at 1 A/cm~2 with 577 nm wavelength and efficacy of 248 lm/W. New LED light source with multi-colors and without phosphor was developed based on the efficient yellow LEDs, opened up a new direction of pure LED healthy lighting.更多还原