【摘要】 针对红外成像制导半实物仿真系统对宽波段、大阵列规模的动态红外场景生成技术的需求,提出了基于微机电系统工艺制作的红外图像转换芯片的动态红外场景生成技术。采用微电机系统(MEMS)工艺实验制备了像元尺寸35μm×35μm、阵列规模大于1 024×1 024、直径为7.62 cm的柔性自悬浮式转换芯片,并研究了转换芯片的时间特性和光谱特性。实验结果表明:转换芯片光谱为黑体谱,覆盖3～5μm和8～12μm。转换芯片的时间常数随衬底厚度和制冷温度的降低而变小,帧频为100 Hz。该技术具有波段范围宽、阵列规模大的优势,可以将其作为红外场景模拟器应用于半实物仿真系统中。更多还原

【Abstract】 Dynamic infraned radiation(IR) scene generation technology based on a flexible free-standing micro-electro-mechanical system(MEMS) infrared transducer is proposed for wide-band and large-scale dynamic IR scene simulator used in the infrared imaging guidance hardware-in-the-loop simulation system. The transducer with a diameter of 7.62 cm and more than 1 024×1 024 pixels is fabricated by MEMS technology, and the pixel size is 35 μm×35 μm in this paper. Radiation spectrum and time characteristic are investigated in experiments. The detected results indicate that the transducer is almost a standard black body over 3-5 μm and 8-12 μm. The transient characteristics of the transducer show that its time constant decreases with the decrease of the substrate thickness or cooling temperature. The frame rate meets 100 Hz. This method has the advantages on wide-band range and large array size, which can be used in the hardware-in-the-loop simulation system for infrared scene simulator.更多还原