【摘要】 扫描探针显微镜(SPM)是微纳结构三维测量中的一项重要技术。然而,在测量过程中台阶或沟槽样品的边缘附近会出现不准确的轮廓,这就造成了深度测量的精度损失。为了避免深度测量的精度损失,分别建立了机械探针和光学探针的两个分析模型,描述了不准确轮廓、样品深度和探针形状之间的耦合关系;在此基础上,提出了一种具有良好精度的深度测量标定方法。与现有的国际深度测量标准(W/3规则)进行比较,该方法提供了一个明确的边界来确定测量结果是否有效;此外,它还可以指导用户在执行测量之前选择适当的探针。更多还原

【Abstract】 Scanning probe microscopy( SPM) is an essential technology for three-dimensional measurement of nano/microstructure. However,there are uncertain profiles near step or groove sample edges,which bring about accuracy loss of depth measurement. In order to avoid the accuracy loss of depth measurement,two analytical models for mechanical probes and optical probes were established respectively,the coupling relationships among uncertain profiles,depth of samples,and shape of probes were depicted. Based on the above models,a calibration method for depth measurement with a promising accuracy was proposed. Compared with the existing international standard for depth measurement( W/3 rule),the proposed method provides a clear boundary to determine if the measurement results are valid. Furthermore,it can also guide the user to select the appropriate probe before performing measurements.更多还原