节点文献
集成式偏振红外焦平面探测器的制备
Polarizer fabricated onto infrared focal detector
【摘要】 集成式偏振红外焦平面探测器是红外探测器应用的新的发展方向,国内近几年开展了相关的研究工作,本文围绕集成式长波320×256碲镉汞偏振红外焦平面探测器的研制,叙述了从技术路线选择到偏振结构的设计、制备等方面开展的工作及阶段测试结果,这些工作为后续的研制打下了良好的基础。
【Abstract】 Integrated polarization infrared focal plane detector is a new development direction of infrared detector application,and relevant research work has been carried out in China in recent years.Focusing on the development of integrated polarization LW 320×256 HgCdTe infrared focal plane detector,this paper introduces the work from the selection of technical route to the design and preparation of polarization structure,and presents the phase test results,which lays a good foundation for the subsequent development.
【关键词】 集成偏振探测器;
光刻;
偏振对比度;
【Key words】 polarizer fabricated onto detector; lithography; extinction ratio;
【Key words】 polarizer fabricated onto detector; lithography; extinction ratio;
- 【文献出处】 激光与红外 ,Laser & Infrared , 编辑部邮箱 ,2019年10期
- 【分类号】TN215
- 【被引频次】4
- 【下载频次】223