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一种基于光纤F-P腔的石墨烯谐振式压力传感器

A Graphene Resonant Pressure Sensor with an Optical Fiber F-P Cavity

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【作者】 李子昂樊尚春李成

【Author】 LI Ziang;FAN Shangchun;LI Cheng;School of Instrumentation Science and Opto-electronics Engineering,Beihang University;Key Laboratory of Quantum Sensing Technology,Ministry of Industry and Information Technology;

【机构】 北京航空航天大学仪器科学与光电工程学院工业和信息化部量子传感技术重点实验室

【摘要】 谐振式传感器具有良好的重复性、分辨率和稳定性,全光纤谐振式微型传感器则集合了微纳结构与光纤传感特性两者的优点。石墨烯作为近年来发现的一种新型材料,具有良好的热学和力学特性,可以作为谐振式传感器中的敏感元件。本文提出了一种基于光纤F-P结构的石墨烯谐振式压力传感器,其兼具微机械传感器和光纤谐振器的优点,具有较高的谐振频率,在测量压力的实验中展现出良好的性能,压力灵敏度最高可达2. 93Hz/Pa,具有重要的应用价值。

【Abstract】 Resonant sensor has good repeatability,resolution and stability. All-fiber resonant micro sensor has the advantages of micronano structure and optical fiber sensing characteristics. Graphene,as a new material discovered in recent years,has good thermodynamic and mechanical properties and can be used as a sensitive element in resonant sensors. A graphene resonant pressure sensor based on optical fiber FP structure is presented in this paper. It has the advantages of both micro-mechanical sensor and optical fiber resonator. It has high resonant frequency. It shows good performance in pressure measurement experiment. The maximum pressure sensitivity can reach 2. 93 Hz/Pa. It has important application value.

【基金】 国家自然科学基金资助项目(61773045,61573033,61721091);教育部创新团队-航空航天先进传感技术(IRT_16R02)
  • 【文献出处】 计测技术 ,Metrology & Measurement Technology , 编辑部邮箱 ,2019年06期
  • 【分类号】TP212
  • 【被引频次】3
  • 【下载频次】540
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