【摘要】 为了解决由于高温而给半导体器件带来的热可靠性问题,本文对新型高效的微通道相变散热器进行研究,设计并制造微通道相变散热器,同时搭建测试系统并以水和乙醇为工质对所设计的散热器进行测试。本实验中工质流量范围在20 mL/min-200 mL/min,所加热流密度分别为200 kW/m2和300 kW/m2,在该实验条件得到散热器的导热系数及温度分布,并对散热器进行建模。通过对实验数据处理与分析发现散热器散热能力主要受流量控制。基于此特点,搭建智能热控系统,对散热器进行控制与管理,从而改善电子器件的热可靠性问题。更多还原

【Abstract】 In order to solve the problem of thermal reliability of semiconductor devices by high temperature,this paper studies a new and efficient microchannel phase change radiator,designs and manufactures the microchannel phase change radiator. Builds a test system to tests the designed radiator with water and ethanol as working fluids. In this experiment,the flow rate ranges from 20 mL/min to200 mL/min,and the density of heat flow rate is 200 kW/m2 and 300 kW/m2. The thermal conductivity and temperature distribution of the radiator were obtained under the experimental conditions,and the radiator is modeled.Through processing and analyzing the experimental data,it is found that the heat dissipation capacity of the radiator is mainly controlled by the flow rate. Based on this feature,an intelligent thermal control system is set up to control and manage the radiator,thus improving the thermal reliability of electronic devices.更多还原