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化学气相沉积制备Co-Re合金涂层的热力学分析
Thermodynamic analysis of chemical vapor deposition process for Co-Re alloy coating
【摘要】 Co-Re合金涂层是一极具潜力的抗高温烧蚀材料。利用HSC Chemistry 6.0软件对化学气相沉积Co-Re合金涂层进行模拟计算。分析结果表明,选择H2-Re2(CO)10和H2-Co(acac)2为反应体系,在0~1 000℃的温度范围内ΔG均小于零;反应产物Re和Co含量随沉积温度的升高而增加,但沉积过程中会有C单质产生;制备Co-Re合金涂层的最佳反应温度区间为400~600℃。
【Abstract】 Co-Re alloy coating is a potential high temperature ablative material. In this paper, HSC Chemistry 6.0 software was used to simulate the chemical vapor deposition of Co-Re alloy coating. The results show that within the temperature range of 0-1 000 ℃, the ΔG was less than zero when selected H2-Re2(CO)10 and H2-Co(acac)2 as reaction system. And, the content of Re and Co increased with the increase of deposition temperature. However, during the deposition process, C simple would produce. The optimum reaction temperature range for the preparation of Co-Re alloy coatings was 400-600 ℃.
【Key words】 Co-Re alloy coating; chemical vapor deposition; thermodynamic; simulate computation;
- 【文献出处】 功能材料 ,Journal of Functional Materials , 编辑部邮箱 ,2019年03期
- 【分类号】TG174.4
- 【被引频次】4
- 【下载频次】207