【摘要】 为了解决旋涂磷源扩散制备发射极片内均匀性差的问题,采用在磷酸溶液中添加二氧化硅纳米球方法,结合旋涂热扩散形成n~+发射极并制作了太阳电池。结果表明:添加纳米球磷扩散后,样品的均匀性从86.0%提升到96.8%,增加了表面掺杂浓度和少子寿命。太阳电池的电致发光(EL)测试表明电池的EL图像亮度也更高更均匀。未添加纳米球扩散中心位置的电池效率为14.25%,边缘效率为8.36%;添加纳米球后中心位置效率为17.04%,边缘效率为16.57%,填充因子由48%提升到78%。更多还原

【Abstract】 In order to improve the uniformity of the n⁺ emitter prepared by phosphorus spin-on doping（SOD）,a new method by adding SiO₂ nanospheres into phosphoric acid solution to make phosphorus source is proposed. After SOD,the n⁺ emitter was fabricated by thermal diffusion and then the solar cells were fabricated by industrialized process. The experimental result showed that the diffusion uniformity increased from 86.0% to 96.8%. The doping concentration and minority carrier lifetime also increased and the electroluminescence（EL）results depicted that the EL images of solar cells with SiO₂ diffusion had higher brightness and uniformity compared with that produced without addition of SiO₂ nanospheres. Solar cell efficiency test demonstrated that the efficiency in sample center prepared by phosphorus source mixed without SiO₂ was 14.25%,while that in sample edge was 8.36%. In contrast,the efficiency in sample center prepared by phosphorus source mixed with SiO₂ was 17.04%,while that in sample edge was 16.57%. The filling factor also increased from 48% in sample without SiO₂ nanospheres to 78% in that with SiO₂ nanospheres.更多还原