【摘要】 "半导体器件实验"是微电子科学与工程专业的重要必修课程。以往的实验教学中存在与理论教学脱节,与工业界标准相差甚远以及实验仪器昂贵等问题。通过建立基于实际代工工艺的半导体集成电路器件模拟测试教学实验平台,模拟最新工业标准的半导体器件的特性,使学生深入理解半导体器件的理论知识,培养创新型人才。更多还原

【Abstract】 Semiconductor Device Experiment is an important compulsory course for microelectronics science and engineering. In the past, there are some problems in experimental teaching, such as disjointing with theoretical teaching, far from the standard of industry, and expensive experimental instruments. Through the establishment of a semiconductor integrated circuit device simulation test teaching experiment platform based on actual foundry technology, the characteristics of the latest industrial standard semiconductor devices are simulated, so that students can deeply understand theoretical knowledge of semiconductor devices and cultivate innovative talents.更多还原