Preliminary results of optical emission spectroscopy by line ratio method in the RF negative ion source at ASIPP

【摘要】 Optical emission spectroscopy（OES） using the trace rare gases of Ar and Xe have been carried out in a radio frequency（RF） driven negative ion source at Institute of Plasma Physics, Chinese Academy of Science（ASIPP）, in order to determine the electron temperature and density of the hydrogen plasma.The line-ratio methods based on population models are applied to describe the radiation process of the excited state particles and establish their relations with the plasma parameters.The spectral lines from the argon and xenon excited state atoms with the wavelength of 750.4 and 828.0 nm are used to calculate the electron temperature based on the corona model.The argon ions emission lines with the wavelength of 480 and 488 nm are selected to calculate the electron density based on the collisional radiative model.OES has given the preliminary results of the electron temperature and density by varying the discharge gas pressure and RF power.According to the experimental results, the typical plasma parameters is T_e ≈ 2-4 eV and n_e ≈ 1 × 10¹⁷-8 × 10¹⁷ m^-3 in front of plasma grid.更多还原

【Abstract】 Optical emission spectroscopy（OES） using the trace rare gases of Ar and Xe have been carried out in a radio frequency（RF） driven negative ion source at Institute of Plasma Physics, Chinese Academy of Science（ASIPP）, in order to determine the electron temperature and density of the hydrogen plasma.The line-ratio methods based on population models are applied to describe the radiation process of the excited state particles and establish their relations with the plasma parameters.The spectral lines from the argon and xenon excited state atoms with the wavelength of 750.4 and 828.0 nm are used to calculate the electron temperature based on the corona model.The argon ions emission lines with the wavelength of 480 and 488 nm are selected to calculate the electron density based on the collisional radiative model.OES has given the preliminary results of the electron temperature and density by varying the discharge gas pressure and RF power.According to the experimental results, the typical plasma parameters is T_e ≈ 2-4 eV and n_e ≈ 1 × 10¹⁷-8 × 10¹⁷ m^-3 in front of plasma grid.更多还原