【摘要】 一维纳米材料与微结构结合的纳器件制造过程,实现了微纳加工工艺上的创新升级,有可能突破微米级器件的性能极限。首先利用传统的硅微加工技术,在综合性能优异的聚酰亚胺PI(Polyimide)薄膜上制作金(Au)微电极,形成排列有序的平行电极对;然后通过交流介电电泳的方法在微电极对间实现单壁碳纳米管SWNTs(Single-Walled Carbon Nanotubes)一维定向排布;接着采用区域选择性电沉积技术定域沉积Au压覆SWNTs,改善SWNTs与电极的接触特性。最后,针对基于SWNTs的柔性微纳传感器进行了力电特性测试。结果表明:在环境温度为(23±5)℃,湿度为65±15%RH,0.1 V工作电压下,压阻因子约为443,精度约为5.16%。上述研究结果在柔性微纳器件的制作方面显示了一定的应用前景,为实现超微型化和高功能密度化的柔性器件铺平道路。更多还原

【Abstract】 Nano device manufacturing process,which is the combination of one-dimensional nanomaterials and microstructure,implements micro-nano processing technology innovation and upgrade. It will break through the performance limits of micron scale devices. First,parallel arrays of Au microelectrode couples are formed in an orderly manner by using traditional silicon micromachining technology on polyimide(PI)film,which has excellent comprehensive properties. Then,one dimensional orientation arrangement of Single-walled carbon nanotubes(SWNTs)is realized by alternating the current dielectrophoresis between the microelectrode couples. Next,regional selective electrodeposition technology is used to deposit localized Au and press over SWNTs,as well as to improve the contact properties of SWNTs with electrodes. Finally,the electro-mechanical characteristics of the flexible micro-nano sensor based on SWNTs are measured. Experimental results indicate that the sensor’s gauge factor can reach higher than 400 with an accuracy of 5.16%,working voltage U=0.1 V,ambient temperature of(23±5)℃,and the humidity of 65±15%RH. The abovementioned results present a certain application prospect in the production of flexible micro-nano devices and will pave the way for ultra-miniaturization and high density function of flexible components.更多还原