【摘要】 光子晶体是一种具有光子能带和带隙特性的空间周期性结构的人工电磁材料,因其具有的强大控光能力而在多种微纳光学功能器件中广泛应用,而光学生物传感器就是其中之一。光学生物传感器由于具有节能环保、抗干扰能力强、响应迅速等优势成为了当前生物传感器的研究热点。硅材料自身具有高折射率和在近红外通讯波段低损耗等优良特性,并且由于互补金属氧化物半导体(complementary metal oxide semiconductor,CMOS)工艺和片上集成技术的快速发展,硅基光子晶体生物传感器不论在工作性能还是在制作成本和规模上都具有独特优势,拥有巨大的研究价值和广阔的市场潜力。本文系统介绍了近期硅基光子晶体结构高性能生物传感器的研究进展并对未来发展做了展望。更多还原

【Abstract】 Photonic crystal is a kind of spatially-periodic artificial electromagnetic material with the existence of photonic band and band gap.It is widely applied in the fields of micro/nano optical functional devices because of its powerful light control ability,and optical biosensor is one of them.Optical biosensors have become the hotspot of biosensor research because of their advantages of energy saving,environmental protection,strong anti-interference ability and rapid response.The silicon material itself has excellent characteristics such as high refractive index and low loss in the near-infrared communication band,and due to the rapid development of complementary metal oxide semiconductor(CMOS)technology and on-chip integration technology,the silicon-based photonic crystal biosensor has unique advantages on both work performance and production cost and scale,and it has huge research value and broad market potential.This paper systematically introduces the recent research progress on high performance biosensors for silicon-based photonic crystal structures and the future is prospected.更多还原