为了解决高温恶劣环境下压力测量问题,设计了一种大压力、高过载、耐高温、耐恶劣环境的小体积压差传感器。通过有限元分析对传感器绝缘体上硅(silicon on insulator,SOI)压力敏感膜片结构进行优化设计,使其能够满足恶劣环境的使用要求。通过试验证明这种压差传感器具有良好的耐高温、耐恶劣环境的特性。
【英文摘要】
In order to solve the problem of pressure measurement under high temperature and harsh environment,a small volume differential pressure sensor resisting high pressure,high overload,high temperature and bad environment was designed and developed. The sensor consisting of silicon on insulator( SOI) pressure sensitive diaphragm was optimized by the finite element analysis method so that it could satisfy the application requirement in bad environment. The experiment proves that the proposed differential pressur...
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