【摘要】 该研究制备的多孔金电极敏感加强型AlN基薄膜体声波传感器谐振频率为1. 214 58 GHz,利用Hg²⁺核酸适配体修饰金电极,形成Hg²⁺生物敏感层。通过T-Hg²⁺-T双碱基对结构特异性俘获目标物Hg²⁺离子,对Hg²⁺在50～1 000 n Mol/L浓度范围内器件频率大小进行了实时监测。实验发现,在100～1 000 n Mol/L浓度范围内,器件频率漂移量和Hg²⁺浓度之间呈线性关系,检测灵敏度约为677. 07 Hz/nMol/L,器件灵敏度高,选择性好。更多还原

【Abstract】 The resonant frequency of the prepared AlN based thin film bulk acoustic resonator（ FBAR） with a porous gold electrode was 1. 214 58 GHz,which was modified by the Hg²⁺ nucleic acid ligands to form a sensitive layer. Based on the T-Hg²⁺ -T double base pair specific reaction,the resonant frequency shifts of various Hg²⁺ concentrations in the range of 50 ～ 1 000 n Mol/L were measured. Experiments show that the resonance frequency of the sensor decreases proportionally in response to the increase of the mass loading in the range of 100 ～ 1 000 n Mol/L. The modified sensor exhibits a high sensitivity of 677. 07 Hz/n Mol/L and good selectivity.更多还原