【摘要】 使用化学气相沉积法生长石墨烯,制备单层和双层石墨烯气敏传感样品,采用拉曼光谱和光学显微镜对所制样品进行表征,通过气敏响应测试,比较单层和双层石墨烯对NO₂的气敏特性.结果表明,双层石墨烯相对单层石墨烯在低NO₂气体体积分数下解吸附时间缩短,响应度提升.在NO₂气体体积分数为10^-6量级时,双层石墨烯比单层石墨烯的响应时间提高近10倍,解吸附时间缩短近4倍,且探测下限达到50×10^-9.更多还原

【Abstract】 Monolayer graphene and bilayer graphene are grown by chemical vapor deposition method and their gas sensing samples are prepared. The samples are characterized by Raman spectroscopy and optical microscopy. The gas-sensing responses of monolayer and bilayer graphene sensors for NO₂ gas are tested. The results show that compared with monolayer graphene sensor,the gas desorption time of bilayer graphene sensor is shorter and the responsiveness is higher in low concentrations of NO₂ gas volume fraction. The bilayer graphene response time increases nearly ten times and its desorption time shortens nearly four times at the order of 10^-6 gas volume fraction.The detection lower limit of bilayer graphene sensor also reaches 50 × 10^-9.更多还原