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氩氧混合气体及纯氧气氛下脉冲激光沉积法制备YBa2Cu3O7-δ超导薄膜的研究
Investigation of YBa2Cu3O7-δ Superconducting Films Prepared in Argon Oxygen Mixed Atmosphere and Pure Oxygen Atmosphere by Pulsed Laser Deposition Method
【摘要】 利用脉冲激光沉积法(PLD)在保证其它实验参数不变的情况下,分别在Ar∶O2为3∶1和纯O2的气氛中,在(001)SrTiO3(STO)基片上制备了外延的高质量YBa2Cu3O7-δ(YBCO)超导薄膜。X射线衍射表明在氩氧混合气体下制备的YBCO薄膜具有更好的结晶质量。扫描电子显微镜测量结果发现:相比于纯O2氛围下制备的YBCO样品,在氩氧混合氛围中制备的薄膜表面具有较小颗粒密度。通过四引线法获得YBCO薄膜的归一化电阻(R/R100K)随温度(T)的变化关系发现,虽然对应不同氛围制备的YBCO薄膜的零电阻转变温度均为90.0 K,但是,对应氩氧混合气体的YBCO具有更小的正常态电阻。研究结果表明脉冲激光制备YBCO的过程中,引入氩气可以改善YBCO薄膜的结构和性能。
【Abstract】 High quality YBa2Cu3O7-δ( YBCO) films were prepared on the Sr Ti O3( 001) substrate by the pulsed laser deposition method( PLD),samples were prepared at the same condition and the atmosphere during the experiment is in Ar and O2 with radio of 3 ∶ 1 and pure O2,respectively. X ray diffraction shows that the YBCO films prepared under argon oxygen mixed gas have better crystallization quality. The morphology of the surface of the film was characterized by scanning electron microscope. It is found that the density of the YBCO particles which prepared in Ar and O2 is reduced. The relation of normalized resistance( R/R100 K) with temperature( T) of YBCO film prepared in Ar and O2 with radio of 3 ∶ 1 and pure O2 was measured by four-probe method. Although the zero resistance transition temperature of YBCO films prepared in different atmospheres is 90. 0 K,the YBCO film prepared in Ar and O2 atmosphere has smaller normal state resistance. The results show that the introduction of argon gas in the preparation of YBCO can improve the structure and properties of the YBCO film.
【Key words】 YBa2Cu3O7-δ thin film; Ar; surface topography; superconductivity;
- 【文献出处】 人工晶体学报 ,Journal of Synthetic Crystals , 编辑部邮箱 ,2018年03期
- 【分类号】TB383.2;TN249
- 【下载频次】114