【摘要】 采用直流磁控溅射（DMS）技术和能量过滤磁控溅射（EFMS）技术在玻璃基底上制备了TiO₂薄膜。用TFC膜系设计软件优化设计了单层和双层减反射薄膜,确定制备工艺参数,根据优化结果分别制备了TiO₂构成的单层和双层薄膜。利用SEM、椭偏仪、接触角测定仪和光催化测试系统对薄膜进行了表征和测试。实验结果表明:优化设计的膜层都具有良好的减反射性能,单层和双层薄膜在400⁸00 nm的平均透射率分别为0.845和0.891。氙灯照射30 min后接触角从61.5°变为28°和8°,后者具有超亲水性。紫外光照下对RhB的降解速率分别为-0.0019min^-1和-0.0034 min^-1,具有良好的自清洁性能。单层和双层TiO₂薄膜具有自清洁和减反射性能。由高低折射率匹配组成的双层薄膜有较平滑的曲线,光催化降降解性能和亲水性较好。更多还原

【Abstract】 TiO₂ thin films were fabricated by the direct current magnetron sputtering（ DMS） technique and energy filtrating magnetron sputtering（ EFMS） technique on the glass substrate. Single and double antireflective layers were designed by the TFC membrane system design software and the parameters were determined. Single and double TiO₂ coatings were prepared on the bases of the optimized results. The coatings were characterized by SEM,ellipsometer,contact angle tester and photochemical catalyst test system. Results show that the optimized coating has good anti-reflective property. The average transmittivity at 400-800 nm for the single and double layers are 0. 845 and 0. 891 respectively. The contact angles becomes from 61. 5° to 28° and 8° when the samples are irradiated by the xenon lamp for30 minutes. The coatings have good self cleaning performance and the degradation rates of RhB under the UV-light are-0. 0019 min^-1 and-0. 0034 min^-1. Single and double coatings with single TiO₂ have both anti-reflective and self-cleaning properties. The double layers composed of matched layers with high and low refractive indices have smoother transmission curve,better photocatalytic degradation propertyand hydrophilicity.更多还原